* Travel ranges to 100 μm × 100 μm in X, Y and to 10 μm in Z * Resolution to 0.1 nm due to capacitive sensors * High velocity versions with direct drive * Vacuum-compatible and nonmagnetic versions on request * Parallel kinematics for highe accuracy and dynamics * Parallel metrology for active compensation of guiding errors * Zero-play, high-precision flexure guide system * Clear aperture 50 mm × 50 mm for transmitted-light applications
